UHV-Leakvalve ND 3
CF-16 1/4″ flanges on the side and the bottom.
Bakeable up to 300°C (Motor can stay on the valve, but must not be heated).
Metallic seal gold-plated.
Stepper motor driven with controller.
With visual position indicator.
Flow rate 10-9 mbar*l/s to 60 mbar*l/s (even lower when baking out).
Analog-Input (0-10V): Remote sensors (pressure, flow) for closed loop control. Remote sensors are not included.
Digital-Input (USB, Ethernet, Modbus): Via Remote Computer
Touchscreen On the control unit.
Step Resolution 1.000.000 with encoder feedback
Software Updates via Network (Ethernet) or USB.
Power Supply 230 VAC or 24 VDC.
With Controller.
Bestellnummer F3CF1616-454.
Dimensional Drawng and 3d Model
Technical Specifications
| Technical Specifications | |
|---|---|
| Material Housing | 1.4404 (316L) |
| Material Sealing | 1.4435 (316L) gold plated |
| Material not in contact with gas | 1.4301 (304) |
| Lifetime | 100,000 cycles until first service |
| Mounting Position | any |
| Internal Pressure | Vacuum to 10 bar |
| Inlet Pressure | 10 bar from each side |
| Tightness Housing | 1*10 -10 mbar.l/s |
| Tightness Valve Seat | 1*10 -10 mbar.l/s |
| Volumes: | |
| Main Flange | 1.0 cm 3 |
| Side Flange | 4.6 cm 3 |
| Weight | 3.8 kg |
| Bakeout Tempertaure: | |
| Valve Open | 450°C |
| Valve Closed or in Operation | 300°C |
| Actuator: | |
| Time to travelk across stroke | 14 seconds |
| Steps / Stroke | 1,000,000 |
| Interfaces | USB Ethernet Modbus Analog |
| Input | Touchscreen |
| Operational Modes | Manual Closed Loop Control Script Commands |