The manual actuator provides the possibility to adjust the gasflow by a habdwheel. The stroke from open to close position is divided into ten turns of the handwheel. the axial stroke is 10mm, the maximum closing torque is 5 Nm.
The handwheel is made of pretected steel. It can be dismantled during baking out.
| Technical Specifications | |
|---|---|
| Material Housing | 1.4404 (316L) |
| Material Sealing | 1.4435 (316L) gold plated |
| Material not in contact with gas | 1.4301 (304) |
| Lifetime | 100,000 cycles until first service |
| Mounting Position | any |
| Internal Pressure | Vacuum to 10 bar |
| Inlet Pressure | 10 bar from each side |
| Tightness Housing | 1*10 -10 mbar.l/s |
| Tightness Valve Seat | 1*10 -10 mbar.l/s |
| Volumes: | |
| Main Flange | 1.0 - 1.4 cm 3 |
| Side Flange | 4.6 cm 3 |
| Bakeout Tempertaure: | |
| Valve Open | 450°C |
| Valve Closed or in Operation | 300°C |
| Weight: | |
| CF 16/16 | 1.6 kg |
| CF 35/16 | 2.2 kg |
| VCR 1/4" | 1.5 kg |
| Actuator: | |
| Stroke: Turns of the Handwheel | 10 |
| max. Tourque | 5 Nm |
Gas Dosing Properties
Closing and Opening
Idealized measurement protocol: Teh handwheel is kept stable for one minute after every turn. The reaction is fast and the throughput is stable.
Durinf the first 3 turns following the open position the diaphragm does not touch the valves seat.
When usind the valve at 20°C control in the range between 10-9 and 10-10 mbarl/s is ot possible due to physical restrictions (red area in the diagram). The valve is then tight aufter the 9th turn. Control in this area needs heating.
The maximum throughput is 60 mbar*l/s.
Actual measurement protocol: Different leakrates (=throughput) are being appraoched and held for 20 seconds.