UHV-Leakvalve ND 3

CF-35 flange at the bottom and CF-16 on the side.
Bakeable up to 300°C (Motor can stay on the valve, but must not be heated).
Metallic seal gold-plated.
Stepper motor driven with controller.
With visual position indicator.

Flow rate          10-9 mbar*l/s to 60 mbar*l/s (even lower when baking out).

Analog-Input     (0-10V): Remote sensors (pressure, flow) for closed loop control. Remote sensors are not included.

Digital-Input      (USB): Via Remote Computer

Touchscreen     On the control unit.

Step Resolution 1.000.000 with encoder feedback

Software           Updates via Network (Ethernet) or USB.

Power Supply   230 VAC or 24 VDC.

With Controller.

Bestellnummer F3CF3516-454.

Spezifikationen

Maßbild und 3D-Modell

Downloads

Dimensional Drawing and 3d model

TEchnical Specifications

Technical Specifications
Material Housing1.4435 (316L)
Material Sealing1.4435 (316L) gold plated
Material not in contact with gas1.4301 (304)
Lifetime100,000 cycles until first service
Mounting Positionany
Internal PressureVacuum to 10 bar
Inlet Pressure10 bar from each side
Tightness Housing1*10 -10 mbar.l/s
Tightness Valve Seat1*10 -10 mbar.l/s
Volumes:
Main Flange1.4 cm 3
Side Flange4.6 cm 3
Weight4.4 kg
Bakeout Tempertaure:
Valve Open450°C
Valve Closed or in Operation300°C
Actuator:
Time to travelk across stroke14 seconds
Steps / Stroke1,000,000
InterfacesUSB
Ethernet
Modbus
Analog
InputTouchscreen
Operational ModesManual
Closed Loop Control
Script Commands

Downloads

Manual

CAD-Data: step