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UHV Gasdosing Valve with Steppermotor

The steppermotor driven valve allows the automation of the gasdosing process. The gasflow can be adjusted via an analog signal (0 - 10VDC) or via PC with a RS232 interface. The stroke is divided into 1,000 steps. When controlled via RS232, the resolution can be increased.

By menas of the steppermotor driven UHV Gasdosing Valve closed loop control of gas flow or pressure in all vacuum areas from low, fine and high to ultrahigh vacuum is possible.

The steppermotor is equipped with a planetary gear designed for longtime work and for high temperatures. An electric switch reports the closed endposition. A thermal resistance ensures that the valve body stays at 300°C, while the actuator does not exceed the allowed 150°C. Thermal insulation of the actuator is not necessary. The valve has only ten seconds operationg time for the whole control range.

Scope of delivery includes: Power cable, RS-cable, all plugs, 5m motor cable. 

Technical Specification Steppermtor Version
Stroke Resolution1.000 steps (can be increased for RS232 control)
Operating Time for the whole Stroke10 s
Power Supply230VAC/110VAC
Operating Modes
  • manual (open/close switch)
  • analog (0-10VDC)
  • RS232 (serial interface)
Motor Cable5 m (expandable up to 20m)
Serial Cable5 m
Power Cable2,5 m